Silicon Sensors and Actuators

Silicon Sensors and Actuators

The Feynman Roadmap

Ferrari, Paolo; Vigna, Benedetto; Villa, Flavio Francesco; Lasalandra, Ernesto; Zerbini, Sarah

Springer Nature Switzerland AG

04/2022

997

Dura

Inglês

9783030801342

15 a 20 dias

1682

Descrição não disponível.

1. Silicon as Sensor Material.- 2. Epitaxial Growth.- 3. Thin Film Deposition.- 4. Thin Films Characterization & Metrology.- 5. Dry silicon etch.- 6. Lithography.- 7. HF Release.- 8. Galvanic growth.- 9. Wet Etch and Cleaning.- 10. Piezoelectric materials.- 11. Wafer to wafer Bonding.-12. Linear and non linear mechanichs in MEMS.- 13. Inertial sensors.- 14. Magnetometer.- 15. MEMS microphones.- 16. Pressure Sensors.- 17. Enviromental Sensors.- 18. Mirror.- 19. Piezo ink jet printers.- 20. Speakers.- 21. Autofocus.- 22. Electronic sensors front-end.- 23. Electronic Interfaces for actuators.- 24. Package.- 25. Testing.- 26. Reliability.- 27. The future of sensor and actuators.

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Actuators;Electronic Interfaces;Fabrication;Mechanical Material;MEMS;Micro Mechanical Transducers;Microelectronics;Microfabrication;More-than-Moore;MtM;Richard Feynman;Sensors;Silicon;Silicon Wafers;STMicroelectronics;Transducers