Scanning Probe Lithography

Scanning Probe Lithography

Fundamentals, Materials, and Applications

Rodrigo, Javier Martinez; Ryu, Yu Kyoung

Taylor & Francis Ltd

12/2022

128

Dura

Inglês

9781032122144

15 a 20 dias

Descrição não disponível.

1. Historical Background and Positioning in the Lithography Roadmap. 2. Basic Concepts and Modalities. 3. Mechanical Scanning Probe Lithography. 4. Dip Pen Nanolithography. 5. Field Emission Scanning Probe Lithography. 6. Oxidation Scanning Probe Lithography. 7. Thermal Scanning Probe Lithography. 8. Lithography Using an Scanning Tunneling Microscope. 9. High Throughput Strategies.

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nanolithography;microlithography;microelectronics;micromachining;NEMS;MEMS surface engineering;2D materials;AFM Tip;AFM Topographic Image;SPL;DPN;American Chemical Society;Tip Sample Distance;InAs Nanowire;AFM Phase Image;IOP;HOPG;SEM;STM Lithography;STM Tip;PDMS Stamp;STM Topographic Image;Gold Nanorods;Ink Molecules;Field Effect Transistors;TMDs;RMS Roughness;HEMT;Energy Profile;PPy;Sodium Dodecylbenzenesulfonate