Low-Energy Ion Irradiation of Materials

Low-Energy Ion Irradiation of Materials

Fundamentals and Application

Rauschenbach, Bernd

Springer Nature Switzerland AG

08/2022

754

Dura

Inglês

9783030972769

15 a 20 dias

1465

Descrição não disponível.
1. Introduction.- 2. Collision processes.- 3. Energy-loss processes and ion range.- 4. Ion beam induced damage.- 5. Sputtering.- 6. Evolution of topography under low-energy ion bombardment.- 7. Ion beam figuring and smoothing.- 8. Ion beam deposition.- 9. Ion beam assisted deposition.- 10. Ion beam sputtering induced glancing angle deposition.
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Ion-Solid Interaction;Ion Beam-Induced Surface Modification;Ion Patterning;Surface Modification of Materials;Applications of Ion Beams;Ion Beam Deposition;Low-Energy Ion Bombardment;Sputtering of Materials;Ion Beam Damage of Materials;Binary Elastic Collisions;Ion Beam Smoothing;Molecular Film Deposition;Epitaxial Growth by Ion Beam Deposition