Handbook of Thin Film Deposition
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Handbook of Thin Film Deposition
Theory, Technology and Semiconductor Applications
Schepis, Dominic; Seshan, Krishna
Elsevier - Health Sciences Division
10/2024
518
Mole
Inglês
9780443135231
Pré-lançamento - envio 15 a 20 dias após a sua edição
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1. Introduction
Part I Reduction to Practice
2. Process Integration for On-Chip Interconnects
3. Sputter Processing
4. Epitaxial Thin Film Growth
5. CVD Processing and Processes
6. CMP: Scaling Down and Stacking Up: How the Trends in Semiconductors are Affecting Chemical-Mechanical Planarization
7. Limits of Gate Dielectric Scaling
Part II Applications and Limitations
8. Reliability Considerations for Thin Film Devices
9. Thin Film Development for LED Technologies
10. Emerging Ferroelectric Thin Films: Applications and Processing
11. Applications of Thin Film in Semiconductor Memories
12. Yield Issues and Defect Density in Thin Films
Part I Reduction to Practice
2. Process Integration for On-Chip Interconnects
3. Sputter Processing
4. Epitaxial Thin Film Growth
5. CVD Processing and Processes
6. CMP: Scaling Down and Stacking Up: How the Trends in Semiconductors are Affecting Chemical-Mechanical Planarization
7. Limits of Gate Dielectric Scaling
Part II Applications and Limitations
8. Reliability Considerations for Thin Film Devices
9. Thin Film Development for LED Technologies
10. Emerging Ferroelectric Thin Films: Applications and Processing
11. Applications of Thin Film in Semiconductor Memories
12. Yield Issues and Defect Density in Thin Films
Este título pertence ao(s) assunto(s) indicados(s). Para ver outros títulos clique no assunto desejado.
Semiconductors; fabrication; nanotechnology; Moore's Law; microelectronics; front end; back end; thin films; optical thin films; material processing
1. Introduction
Part I Reduction to Practice
2. Process Integration for On-Chip Interconnects
3. Sputter Processing
4. Epitaxial Thin Film Growth
5. CVD Processing and Processes
6. CMP: Scaling Down and Stacking Up: How the Trends in Semiconductors are Affecting Chemical-Mechanical Planarization
7. Limits of Gate Dielectric Scaling
Part II Applications and Limitations
8. Reliability Considerations for Thin Film Devices
9. Thin Film Development for LED Technologies
10. Emerging Ferroelectric Thin Films: Applications and Processing
11. Applications of Thin Film in Semiconductor Memories
12. Yield Issues and Defect Density in Thin Films
Part I Reduction to Practice
2. Process Integration for On-Chip Interconnects
3. Sputter Processing
4. Epitaxial Thin Film Growth
5. CVD Processing and Processes
6. CMP: Scaling Down and Stacking Up: How the Trends in Semiconductors are Affecting Chemical-Mechanical Planarization
7. Limits of Gate Dielectric Scaling
Part II Applications and Limitations
8. Reliability Considerations for Thin Film Devices
9. Thin Film Development for LED Technologies
10. Emerging Ferroelectric Thin Films: Applications and Processing
11. Applications of Thin Film in Semiconductor Memories
12. Yield Issues and Defect Density in Thin Films
Este título pertence ao(s) assunto(s) indicados(s). Para ver outros títulos clique no assunto desejado.